Direct
Forming of Microoptics Using a Dynamic Photomask
Description
Microoptics are key to information processing,
optoelectronics, and integrated optics. Existing fabrication
methods involve expensive lithographic masks, complicated
molding, and reactive ion etching. These methods lack the
flexibility in geometry and are often limited to low-profile
microoptics, which typically do not possess high numerical
aperture required by many applications. The technology is
an innovative method to design and fabricate microoptics using
dynamic photomasks. It provides:
1) a significant degree of freedom in the geometry of the
optics;
2) changing geometries can be done on the fly, without requiring
to make or to switch photomasks;
3) little or no tool contamination and wear compared to a
typical replication process; and
4) low cost, fast turnaround, and flexible design
Benefits
Fast processing
Free-form fabrication
Design flexibility
Scalable
Low costs
Features
This innovation represents a strategy for manufacturing
precision microoptics.
The use of a dynamic photomasks offers fast turn-around
and enables changing geometries "on the fly".
This method accommodates complex and high profile geometries.
