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Bellows Sealed Valves for Ultra
High Vacuum System
 Introduction
Vacuum valves are indispensable components of any vacuum
system extensively used in research and development work and
in many process lines. These facilitate isolation of a part
of the system during servicing, maintenance, loading of samples
etc.
Both angle and in-line valves are bellows sealed to ensure
high leak tightness during their operation. In-line type includes
gate and butterfly valves and angle type a right angle valve.
Gate type is available in 6 mm and 12 mm sizes, which are
`High Vacuum' compatible and 25 mm size, which is `Ultra High
Vacuum' compatible. Butterfly type has the largest open conductance
and is highly compact in size. It can also be used as a throttle
or conductance control valve. Gate valves being fully open
and in-line valves offer unrestricted opening and are ideally
suited for applications such as beam transportation systems
and load locks for sample introduction. Right angle valves
are used for roughing and baking, venting and leak testing
applications.
The vacuum valve is made of three members namely:
i) Valve body
ii) Sealing plate and
iii) Trim or actuating mechanism.
i) Valve body
Construction of material is SS-304. It has a flange on top
for mounting the actuacting mechanism. The end configuration
conforms to ISO standard such as Klein flange or Conflat.
ii) Sealing plate
This is a disc/ flapper plate/ wedge shaped piece
iii) Actuating mechanism
Screw type All parts prior to assembly need to be thoroughly
cleaned & dried.
Raw materials
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All main parts
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- SS 304
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Bellows
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- SS-316 L or 321
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Plate / Body Seal
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- Soft Viton `O' ring
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- Leak tight valves operating in the range of 10-6 to 10-9
torr
- Right Angle and In-line types
- High Reliability
- Manual /Automatic Operation
- Long Service Life
- Easy Serviceability
- Ability to withstand repeated bakeouts
Specifications
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Size
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6 mm
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12 mm
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25 mm
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63 mm
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100 mm
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Type
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Gate
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Gate
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Gate/ Rt. angle
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Butterfly
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Gate/ Butterfly
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Mounting Flange
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KF
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KF
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CF/KF
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CF
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CF
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Operation
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Manual
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Manual/ automatic
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Toggle/ automatic
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Manual/ automatic
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Manual/ automatic
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Bakebility
(open condition)
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150 0 C
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150 0 C
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300 0 C/ 150 0 C
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300 0 C
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300 0 C
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Overall Leak Tightness
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1x10 -9 cc/sec
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1x10 -10
cc/sec
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1x10 -11 cc/sec
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1x10 -11 cc/sec
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1x10 -11 cc/sec
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For further information please contact
:
Head,
Technology Transfer & Collaboration Division,
Bhabha Atomic Research Centre,
Trombay, Mumbai - 400 085
Tel : 091-022-25505337/25593897
Fax : 091-022-25505151
E-mail : headttcd@barc.gov.in
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